착색된 글레이징의 수득을 위한 타겟

• Main Authors: MATEUS CRISALIA, MAGDENKO SAVOUREY LIUBOV, BILLIERES DOMINIQUE, MARLIN SAMUEL
• Format: Patent
• Language: Korean
• Published: 19.12.2019
• Subjects: ARTIFICIAL STONE; BASIC ELECTRIC ELEMENTS; CEMENTS; CERAMICS; CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUSENAMELS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS; CONCRETE; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY; GLASS; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; JOINING GLASS TO GLASS OR OTHER MATERIALS; LIME, MAGNESIA; METALLURGY; MINERAL OR SLAG WOOL; REFRACTORIES; SLAG; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS,MINERALS OR SLAGS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; TREATMENT OF NATURAL STONE

한편으로는, 티타늄, 규소 및 지르코늄으로 이루어진 군으로부터 선택되는 적어도 하나의 원소의 산화물, 및 다른 한편으로는 은, 금, 백금, 구리 및 니켈로 이루어진 군으로부터 선택되는 금속의 입자 또는 이러한 금속 중 적어도 둘로 이루어진 합금의 입자로 이루어진 스퍼터링 캐소드 타겟이며, 여기서 상기 타겟의 원자비 M/Me는 1.5 미만이고, M은 상기 층에 존재하는 상기 티타늄, 규소 및 지르코늄의 군의 원소의 모든 원자를 나타내고, Me는 상기 층에 존재하는 은, 금, 백금, 구리 및 니켈로 이루어진 군의 금속의 모든 원자를 나타낸다. A cathode sputtering target is formed, on the one hand, from an oxide of at least one element chosen from the group of titanium, silicon and zirconium and, on the other hand, of particles of a metal included in the group formed by silver, gold, platinum, copper and nickel or particles of an alloy formed from at least two of these metals, the atomic ratio M/Me in the target being less than 1.5, M representing all of the atoms of the elements of the group of titanium, silicon and zirconium present in the layer and Me representing all of the atoms of the metals of the group formed by silver, gold, platinum, copper and nickel present in the layer.