Substrate Support Mechanism And Substrate Cleaning Device Including The Same
A substrate support mechanism includes: a support member on which a substrate is loaded; a rotating machine rotating the support member; and a vibrator vibrating the substrate in a direction substantially vertical to the substrate, wherein the substrate vibrates in accordance with the natural freque...
Saved in:
| Main Authors | , , |
|---|---|
| Format | Patent |
| Language | English Korean |
| Published |
24.07.2019
|
| Subjects | |
| Online Access | Get full text |
Cover
Loading…
| Abstract | A substrate support mechanism includes: a support member on which a substrate is loaded; a rotating machine rotating the support member; and a vibrator vibrating the substrate in a direction substantially vertical to the substrate, wherein the substrate vibrates in accordance with the natural frequency of the substrate or vibrates in accordance with the natural frequency of particles on the substrate.
기판 지지 기구는, 기판이 적재되는 지지 부재; 상기 지지 부재를 회전시키는 회전기; 및 상기 기판을 상기 기판에 실질적으로 수직하는 방향으로 진동시키는 진동기를 포함하며, 상기 기판은, 상기 기판의 고유 진동수(Natural frequency)에 따라 진동하거나, 상기 기판 상의 파티클의 고유 진동수에 따라 진동한다. |
|---|---|
| AbstractList | A substrate support mechanism includes: a support member on which a substrate is loaded; a rotating machine rotating the support member; and a vibrator vibrating the substrate in a direction substantially vertical to the substrate, wherein the substrate vibrates in accordance with the natural frequency of the substrate or vibrates in accordance with the natural frequency of particles on the substrate.
기판 지지 기구는, 기판이 적재되는 지지 부재; 상기 지지 부재를 회전시키는 회전기; 및 상기 기판을 상기 기판에 실질적으로 수직하는 방향으로 진동시키는 진동기를 포함하며, 상기 기판은, 상기 기판의 고유 진동수(Natural frequency)에 따라 진동하거나, 상기 기판 상의 파티클의 고유 진동수에 따라 진동한다. |
| Author | KIM BYUNG GOOK OH JONG KEUN LIM KYEONG BIN |
| Author_xml | – fullname: KIM BYUNG GOOK – fullname: LIM KYEONG BIN – fullname: OH JONG KEUN |
| BookMark | eNrjYmDJy89L5WTwCS5NKi4pSixJVQguLSjILypR8E1NzkjMyyzOVXDMS1FAyDvnpAKF89IVXFLLMpNTFTzzknNKU0ACIRlA3Ym5qTwMrGmJOcWpvFCam0HZzTXE2UM3tSA_PrW4IDE5NS-1JN47yMjA0NLAwMLMwtTS0Zg4VQBkQDfh |
| ContentType | Patent |
| DBID | EVB |
| DatabaseName | esp@cenet |
| DatabaseTitleList | |
| Database_xml | – sequence: 1 dbid: EVB name: esp@cenet url: http://worldwide.espacenet.com/singleLineSearch?locale=en_EP sourceTypes: Open Access Repository |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Medicine Chemistry Sciences |
| DocumentTitleAlternate | 기판 지지 기구 및 이를 포함하는 기판 세정 장치 |
| ExternalDocumentID | KR20190086859A |
| GroupedDBID | EVB |
| ID | FETCH-epo_espacenet_KR20190086859A3 |
| IEDL.DBID | EVB |
| IngestDate | Fri Aug 23 06:56:21 EDT 2024 |
| IsOpenAccess | true |
| IsPeerReviewed | false |
| IsScholarly | false |
| Language | English Korean |
| LinkModel | DirectLink |
| MergedId | FETCHMERGED-epo_espacenet_KR20190086859A3 |
| Notes | Application Number: KR20180004921 |
| OpenAccessLink | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20190724&DB=EPODOC&CC=KR&NR=20190086859A |
| ParticipantIDs | epo_espacenet_KR20190086859A |
| PublicationCentury | 2000 |
| PublicationDate | 20190724 |
| PublicationDateYYYYMMDD | 2019-07-24 |
| PublicationDate_xml | – month: 07 year: 2019 text: 20190724 day: 24 |
| PublicationDecade | 2010 |
| PublicationYear | 2019 |
| RelatedCompanies | SAMSUNG ELECTRONICS CO., LTD |
| RelatedCompanies_xml | – name: SAMSUNG ELECTRONICS CO., LTD |
| Score | 3.1964643 |
| Snippet | A substrate support mechanism includes: a support member on which a substrate is loaded; a rotating machine rotating the support member; and a vibrator... |
| SourceID | epo |
| SourceType | Open Access Repository |
| SubjectTerms | BASIC ELECTRIC ELEMENTS CLEANING CLEANING IN GENERAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL SEMICONDUCTOR DEVICES TRANSPORTING |
| Title | Substrate Support Mechanism And Substrate Cleaning Device Including The Same |
| URI | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20190724&DB=EPODOC&locale=&CC=KR&NR=20190086859A |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV3dT8IwEL8gGvVNUeMHmiaavS3uo9vggRjYRojIRyYa3si6lYQ4BpER_33v5hCeyF66XtK0Te_u12vvV4AnI4wjh2tCjXg9VLnhhKrQhanGuq0JLTKJc4puW_Ttzgd_HVvjEiSbXJicJ_QnJ0dEjYpQ37PcXi-3QSwvv1u5ehYzrFq8tEcNTyl2x-jdHIMrXqvhDwfewFVct9ENlH7wJ0P4XrPqzQM4JCBNTPv-Z4vyUpa7TqV9BkdDbC_NzqH0tajAibt5e60Cx73iyBuLhfatLuCNtDxnk2X0GCcCZ9aTlLk7W81ZM43ZVu4mMqSIB_MkmQKGZiBZk5tiuC7YeziXl_DY9kduR8VuTf5nYdINdsdgXkE5XaTyGpimRfrU4TU7tjgP46lABCC4xE9EBN9uoLqvpdv94js4pV8KZxq8CuXsey3v0Q9n4iGfvl-6u4vD |
| link.rule.ids | 230,309,786,891,25594,76903 |
| linkProvider | European Patent Office |
| linkToHtml | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfR1NT8Iw9AXRiDdFjR-oTTS7LW6jMDgQAx0EZQOCaLgta1cSIgwiI_59XysIJ9JL05c07UvfZ98HwJMTxcKlFjcFrUYmddzI5DYvmrFdtrgliqrmlIq26JbbH_RtVBplYLrJhdF1Qn90cUSkKIH0nmp-vdg6sTwdW7l85hNcmr-0hjXPWFvHKN1chxpeo9bs97weMxirdQZGd_AHQ_W9UqrWD-DQRaNQG0ufDZWXstgVKq1TOOrjfkl6BpmveR5ybNN7LQ_HwfrLG6dr6lueg6-oXFeTJaoZJyrOJJAqc3eynJF6EpMtnE1lpDwexJOKFRBkA9OVElME3wV5j2byAh5bzSFrm3is8B8LYWewe4fiJWSTeSKvgFiWsMcurZTjEqVRPOaoAXAqcXCh1LdrKOzb6WY_-AFy7WHgh_5rt3MLJwqkXJsOLUA2_V7JO5TJKb_XqPwFaLiOrQ |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Apatent&rft.title=Substrate+Support+Mechanism+And+Substrate+Cleaning+Device+Including+The+Same&rft.inventor=KIM+BYUNG+GOOK&rft.inventor=LIM+KYEONG+BIN&rft.inventor=OH+JONG+KEUN&rft.date=2019-07-24&rft.externalDBID=A&rft.externalDocID=KR20190086859A |