임프린트 장치 및 물품 제조 방법

• Main Author: OTA JUN
• Format: Patent
• Language: Korean
• Published: 15.03.2019
• Subjects: AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING; APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; CINEMATOGRAPHY; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; MICROSTRUCTURAL TECHNOLOGY; ORIGINALS THEREFOR; PERFORMING OPERATIONS; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS; SEMICONDUCTOR DEVICES; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR; SHAPING OR JOINING OF PLASTICS; TRANSPORTING; WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL

임프린트 장치는, 기판 상에서 형틀을 사용하여 임프린트재를 성형한다. 임프린트 장치는, 상기 기판을 보유 지지하는 가동의 스테이지와, 상기 임프린트재를 토출하는 공급부와, 상기 임프린트재가 상기 기판 상에 공급되도록 상기 스테이지를 이동시키면서 상기 공급부로 상기 임프린트재를 토출시키는 제어부를 구비하고, 상기 제어부는, 상기 공급부로부터의 임프린트재의 토출량과 해당 토출량의 임프린트재가 목표물 상에 배치되는 위치와의 관계를 나타내는 특성 정보에 기초하여, 상기 기판의 목표 위치에 목표량의 임프린트재가 배치되도록 상기 공급부로부터의 임프린트재의 토출을 제어한다. An imprint apparatus forms imprint material using a mold on a substrate. The imprint apparatus includes a movable stage configured to hold the substrate, a supply portion configured to discharge the imprint material, and a control unit configured to cause the supply portion to discharge the imprint material while moving the stage so that the imprint material is supplied onto the substrate. The control unit controls discharge of the imprint material from the supply portion so that a target amount of the imprint material is arranged at a target position on the substrate, based on property information indicating a relation between a discharge amount of imprint material from the supply portion and a position on a target object where the imprint material is to be arranged.