SURFACE TREATMENT METHOD AND SURFACE TREATMENT DEVICE

• Main Authors: INOUE HIROYUKI, HIRAMATSU SHINNICHI, YAMANISHI KAZUOMI, YAMAMOTO IZURU
• Format: Patent
• Language: English; Korean
• Published: 28.12.2017
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

Provided is a surface processing method for performing the surface processing of an object (P) by allowing a processing gas (G2) to come into contact with the heated object (P) and solidifying the element of the processing gas (G2). The object (P) is heated to an elevated temperature (T1) near a pro...