METHOD AND APPARATUS FOR REDUCING IN-PROCESS AND IN-USE STICTION FOR MEMS DEVICES

• Main Authors: WU CHANG MING, LIU SHIH CHANG, TSENG LEE CHUAN, HSIEH YUAN CHIH
• Format: Patent
• Language: English; Korean
• Published: 12.04.2017
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES; MICROSTRUCTURAL TECHNOLOGY; PERFORMING OPERATIONS; PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS; SEMICONDUCTOR DEVICES; TRANSPORTING

The present invention relates to a method of manufacturing a microelectromechanical system (MEMS) device. A plurality of openings is formed on a first side of a first substrate. A dielectric layer is formed on the first side of the substrate. A plurality of portions of the dielectric layer fill in t...