SUBSTRATE CASSETTE

The present invention relates to a substrate cassette. The substrate cassette comprises: a frame; a substrate holder which has multiple first support parts protruding from the inner wall of the frame to support the edge of a substrate and multiple second support parts for supporting the center area...

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Bibliographic Details
Main Authors LEE, YU JIN, JEON, YEON MUN, SONG, MIN CHUL, CHO, YOUNG JE
Format Patent
LanguageEnglish
Korean
Published 22.07.2016
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:The present invention relates to a substrate cassette. The substrate cassette comprises: a frame; a substrate holder which has multiple first support parts protruding from the inner wall of the frame to support the edge of a substrate and multiple second support parts for supporting the center area of the substrate; and a height adjusting unit which moves the second support parts in a vertical direction. Therefore, the present invention stores the substrate therein while maintaining the curved state of the substrate. 본 발명은 프레임; 및 상기 프레임 내벽에서 돌출하여 기판의 가장자리를 지지하는 복수의 제1지지부; 및 기판의 중앙영역을 지지하는 복수의 제2지지부;를 포함하는 기판 홀더; 및 상기 제2지지부를 수직방향으로 이동시키는 높이 조절 유닛을 포함하는 기판 카세트에 관한 것이다.
Bibliography:Application Number: KR20150006345