EVAPORATING SOURCE FOR PRODUCING THIN FILM
The present invention relates to an evaporating source for forming a thin film. The evaporating source according to the present invention includes a crucible which stores a deposition material; and inner plates which touch the inner surface of the crucible, are separated in the vertical direction of...
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Format | Patent |
Language | English Korean |
Published |
17.02.2016
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Abstract | The present invention relates to an evaporating source for forming a thin film. The evaporating source according to the present invention includes a crucible which stores a deposition material; and inner plates which touch the inner surface of the crucible, are separated in the vertical direction of the crucible, and have at least one opening part respectively. Thereby, the injection pressure of the evaporated deposition material can be easily controlled. The components of the evaporated deposition material are uniformly mixed by increasing a traveling distance in the crucible of the injected deposition material. So, a thin film with uniform composition can be obtained. The thickness profile of the thin film can be made uniform by controlling the inner pressure of the crucible.
본 발명은 박막형성용 증발원에 관한 것으로서, 본 발명에 따른 박막형성용 증발원은 증착 물질이 담겨지는 도가니; 상기 도가니에 내접하면서 상기 도가니의 수직방향으로 이격되어 설치되며, 각각 적어도 하나의 개구부가 형성되는 복수 개의 이너플레이트;를 포함한다. 이에 의하여, 증기 상태로 분사되는 증착 물질의 분사압력을 용이하게 조절할 수 있고, 분사되는 증착 물질의 도가니 내에서의 이동거리를 증가시켜 증기 상태의 증착 물질의 성분이 고르게 섞여 성분비가 균일한 박막을 얻을 수 있으며, 도가니 내부의 압력을 조절하여 박막의 두께 프로파일을 균일하게 할 수 있다. |
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AbstractList | The present invention relates to an evaporating source for forming a thin film. The evaporating source according to the present invention includes a crucible which stores a deposition material; and inner plates which touch the inner surface of the crucible, are separated in the vertical direction of the crucible, and have at least one opening part respectively. Thereby, the injection pressure of the evaporated deposition material can be easily controlled. The components of the evaporated deposition material are uniformly mixed by increasing a traveling distance in the crucible of the injected deposition material. So, a thin film with uniform composition can be obtained. The thickness profile of the thin film can be made uniform by controlling the inner pressure of the crucible.
본 발명은 박막형성용 증발원에 관한 것으로서, 본 발명에 따른 박막형성용 증발원은 증착 물질이 담겨지는 도가니; 상기 도가니에 내접하면서 상기 도가니의 수직방향으로 이격되어 설치되며, 각각 적어도 하나의 개구부가 형성되는 복수 개의 이너플레이트;를 포함한다. 이에 의하여, 증기 상태로 분사되는 증착 물질의 분사압력을 용이하게 조절할 수 있고, 분사되는 증착 물질의 도가니 내에서의 이동거리를 증가시켜 증기 상태의 증착 물질의 성분이 고르게 섞여 성분비가 균일한 박막을 얻을 수 있으며, 도가니 내부의 압력을 조절하여 박막의 두께 프로파일을 균일하게 할 수 있다. |
Author | KIM, MYEONG HUI LEE, KWANG HYUNG YOON, SUNG WON LEE, YEONG HU PAHK, HEUI JAE |
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Title | EVAPORATING SOURCE FOR PRODUCING THIN FILM |
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