Abstract The purpose of the present invention is to propose a substrate surface treating device capable of improving treatment accuracy as well as improving uniformity and preventing the circuit board width variations and obtaining excellent economic efficiency. To achieve the same, various kinds of settings of discharge positions of spray nozzles (5) are combined for the substrate surface treating device (1). The substrate surface treating device uniformly treats a substrate (A) with a treatment solution sprayed from the spray nozzles (5) base on the combination of: a setting to a position relation that the spray nozzles (5), which are positioned in the front and rear sides, displaced successively and transversely as much as a transverse gap (K) without being in a longitudinal row; a setting of a vertical interval between the spray nozzles (5) and the substrate (A); and a setting of a transverse pitch between the spray nozzles (5). The displaced gap (K) between the spray nozzles (5) is 5-25 mm. The vertical interval between the spray nozzles (5) is 30-150 mm. The transverse pitch (N) between the spray nozzles (5) is 30-120 mm. 본 발명은 첫째로, 유니포미티가 향상되는 등 처리 정밀도가 향상되고, 회로 폭의 편차 발생이 방지됨과 동시에, 둘째로, 또한 이것이 비용면에서 우수하게 실현되는 기판재의 표면 처리 장치를 제안하는 것을 과제로 한다. 상기 과제를 해결하기 위해, 본 발명의 기판재의 표면 처리 장치(1)는 스프레이 노즐(5)의 배설(配設) 위치 설정 등을 각종 조합하여 이루어진다. 스프레이 노즐(5)은 전후에 위치하는 상호 간이 전후로 열을 이루지 않고, 좌우 어긋난 간격(K)만큼 순차 좌우로 어긋난 위치 관계로의 설정, 스프레이 노즐(5)과 기판재(A) 간의 상하 간격의 설정, 및 스프레이 노즐(5) 간의 좌우 피치 간격(N)의 설정의 조합에 기초하여, 스프레이 노즐(5)로부터 분사되는 처리액으로 기판재(A)를 균일 처리한다. 그리고 스프레이 노즐(5)은 좌우 어긋난 간격(K)이 5∼25 ㎜, 상하 간격이 30∼150 ㎜, 좌우 피치 간격(N)이 30∼120 ㎜로 설정되는 것을 특징으로 한다.
AbstractList The purpose of the present invention is to propose a substrate surface treating device capable of improving treatment accuracy as well as improving uniformity and preventing the circuit board width variations and obtaining excellent economic efficiency. To achieve the same, various kinds of settings of discharge positions of spray nozzles (5) are combined for the substrate surface treating device (1). The substrate surface treating device uniformly treats a substrate (A) with a treatment solution sprayed from the spray nozzles (5) base on the combination of: a setting to a position relation that the spray nozzles (5), which are positioned in the front and rear sides, displaced successively and transversely as much as a transverse gap (K) without being in a longitudinal row; a setting of a vertical interval between the spray nozzles (5) and the substrate (A); and a setting of a transverse pitch between the spray nozzles (5). The displaced gap (K) between the spray nozzles (5) is 5-25 mm. The vertical interval between the spray nozzles (5) is 30-150 mm. The transverse pitch (N) between the spray nozzles (5) is 30-120 mm. 본 발명은 첫째로, 유니포미티가 향상되는 등 처리 정밀도가 향상되고, 회로 폭의 편차 발생이 방지됨과 동시에, 둘째로, 또한 이것이 비용면에서 우수하게 실현되는 기판재의 표면 처리 장치를 제안하는 것을 과제로 한다. 상기 과제를 해결하기 위해, 본 발명의 기판재의 표면 처리 장치(1)는 스프레이 노즐(5)의 배설(配設) 위치 설정 등을 각종 조합하여 이루어진다. 스프레이 노즐(5)은 전후에 위치하는 상호 간이 전후로 열을 이루지 않고, 좌우 어긋난 간격(K)만큼 순차 좌우로 어긋난 위치 관계로의 설정, 스프레이 노즐(5)과 기판재(A) 간의 상하 간격의 설정, 및 스프레이 노즐(5) 간의 좌우 피치 간격(N)의 설정의 조합에 기초하여, 스프레이 노즐(5)로부터 분사되는 처리액으로 기판재(A)를 균일 처리한다. 그리고 스프레이 노즐(5)은 좌우 어긋난 간격(K)이 5∼25 ㎜, 상하 간격이 30∼150 ㎜, 좌우 피치 간격(N)이 30∼120 ㎜로 설정되는 것을 특징으로 한다.
Author TSUBOI HIROKAZU
KIYOKAWA KEISHI
HAYASHI TOSHIO
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Snippet The purpose of the present invention is to propose a substrate surface treating device capable of improving treatment accuracy as well as improving uniformity...
SourceID epo
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SubjectTerms CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS
CHEMICAL SURFACE TREATMENT
CHEMISTRY
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING MATERIAL WITH METALLIC MATERIAL
COATING METALLIC MATERIAL
DIFFUSION TREATMENT OF METALLIC MATERIAL
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL
MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
METALLURGY
MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLICMATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASSC23 AND AT LEAST ONEPROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE
PRINTED CIRCUITS
Title SURFACE TREATMENT EQUIPMENT FOR PRINTED CIRCUIT BOARD
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