REGISTRATION OF CAD DATA WITH SEM IMAGES
An image processing method includes providing a microscopic image of a structure manufactured on a substrate and computer-aided design (CAD) data used in manufacturing the structure. The microscope image is processed by a computer to generate a first directionality map which includes, for a matrix o...
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Main Authors | , , , , |
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Format | Patent |
Language | English Korean |
Published |
11.02.2016
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Abstract | An image processing method includes providing a microscopic image of a structure manufactured on a substrate and computer-aided design (CAD) data used in manufacturing the structure. The microscope image is processed by a computer to generate a first directionality map which includes, for a matrix of points in the microscopic image, respective directionality vectors corresponding to magnitudes and directions of edges at the points irrespective of a sign of the magnitudes. The CAD data are processed by the computer to calculate a simulated image based on the CAD data, and to generate a second directionality map based on the simulated image. The first and the second directionality maps are compared by the computer to register the CAD data and the microscope image.
이미지 프로세싱 방법은 기판 상에 제조된 구조의 현미경 이미지 및 구조를 제조하는데 사용된 cad(computer-aided design) 데이터를 제공하는 것을 포함한다. 현미경 이미지는, 현미경 이미지의 점들의 매트릭스에 대해, 엣지들의 방향들 및 크기들에 대응하는 각각의 방향성 벡터들을 크기들의 부호와 무관한 점들에 포함하는 제 1 방향성 맵을 생성하도록, 컴퓨터에 의해 프로세싱된다. cad 데이터는 cad 데이터에 기초하여 시뮬레이팅된 이미지를 산출하고 그리고 시뮬레이팅된 이미지에 기초하여 제 2 방향성 맵을 생성하도록 컴퓨터에 의해 프로세싱된다. 제 1 및 제 2 방향성 맵들은 cad 데이터와 현미경 이미지를 레지스터링하도록 컴퓨터에 의해 비교된다. |
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AbstractList | An image processing method includes providing a microscopic image of a structure manufactured on a substrate and computer-aided design (CAD) data used in manufacturing the structure. The microscope image is processed by a computer to generate a first directionality map which includes, for a matrix of points in the microscopic image, respective directionality vectors corresponding to magnitudes and directions of edges at the points irrespective of a sign of the magnitudes. The CAD data are processed by the computer to calculate a simulated image based on the CAD data, and to generate a second directionality map based on the simulated image. The first and the second directionality maps are compared by the computer to register the CAD data and the microscope image.
이미지 프로세싱 방법은 기판 상에 제조된 구조의 현미경 이미지 및 구조를 제조하는데 사용된 cad(computer-aided design) 데이터를 제공하는 것을 포함한다. 현미경 이미지는, 현미경 이미지의 점들의 매트릭스에 대해, 엣지들의 방향들 및 크기들에 대응하는 각각의 방향성 벡터들을 크기들의 부호와 무관한 점들에 포함하는 제 1 방향성 맵을 생성하도록, 컴퓨터에 의해 프로세싱된다. cad 데이터는 cad 데이터에 기초하여 시뮬레이팅된 이미지를 산출하고 그리고 시뮬레이팅된 이미지에 기초하여 제 2 방향성 맵을 생성하도록 컴퓨터에 의해 프로세싱된다. 제 1 및 제 2 방향성 맵들은 cad 데이터와 현미경 이미지를 레지스터링하도록 컴퓨터에 의해 비교된다. |
Author | KAIZERMAN IDAN ZVITIA ORLY SCHWARZBAND ISHAI RAVID DANIEL IVANCHENKO YAN |
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DocumentTitleAlternate | SEM 이미지들과 CAD 데이터의 레지스트레이션 |
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Title | REGISTRATION OF CAD DATA WITH SEM IMAGES |
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