OPTICAL STRUCTURE ON WHICH CONNECTING PIECES ARE MOUNTED AND METHOD FOR PRODUCING SAID OPTICAL STRUCTURE

An apparatus having an optical structure, ridges and an electrostatic actuator is described, wherein the ridges connect the optical structure to a supporting structure and the electrostatic drive is implemented to deflect the optical structure.

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Bibliographic Details
Main Authors REIMANN ANDREAS, WIPPERMANN FRANK, LANGE NICOLAS, BRAEUER ANDREAS
Format Patent
LanguageEnglish
Korean
Published 24.08.2015
Subjects
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
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Abstract An apparatus having an optical structure, ridges and an electrostatic actuator is described, wherein the ridges connect the optical structure to a supporting structure and the electrostatic drive is implemented to deflect the optical structure.
AbstractList An apparatus having an optical structure, ridges and an electrostatic actuator is described, wherein the ridges connect the optical structure to a supporting structure and the electrostatic drive is implemented to deflect the optical structure.
Author WIPPERMANN FRANK
REIMANN ANDREAS
BRAEUER ANDREAS
LANGE NICOLAS
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Snippet An apparatus having an optical structure, ridges and an electrostatic actuator is described, wherein the ridges connect the optical structure to a supporting...
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SubjectTerms OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
Title OPTICAL STRUCTURE ON WHICH CONNECTING PIECES ARE MOUNTED AND METHOD FOR PRODUCING SAID OPTICAL STRUCTURE
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