LED LIGHT SOURCE DEVICE, FILM THICKNESS MEASURING DEVICE AND THIN FILM DEPOSITION DEVICE

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Main Authors OTAKI YOSHIYUKI, NAGAE EKISHU, SAI KYOKUYO, HINATA YOHEI, MIYAUCHI MITSUHIRO
Format Patent
LanguageEnglish
Korean
Published 15.10.2014
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
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Author SAI KYOKUYO
HINATA YOHEI
OTAKI YOSHIYUKI
MIYAUCHI MITSUHIRO
NAGAE EKISHU
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RelatedCompanies SHINCRON CO., LTD
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SubjectTerms BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
Title LED LIGHT SOURCE DEVICE, FILM THICKNESS MEASURING DEVICE AND THIN FILM DEPOSITION DEVICE
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