MOVABLE MICROCHAMBER SYSTEM WITH GAS CURTAIN

• Main Authors: PUN DIGBY, SHAJII ALI, ELLIS RAYMOND, MCWHIRTER JAMES T, COWE ANDREW B
• Format: Patent
• Language: English; Korean
• Published: 10.06.2014
• Subjects: BASIC ELECTRIC ELEMENTS; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR; PERFORMING OPERATIONS; SEMICONDUCTOR DEVICES; SOLDERING OR UNSOLDERING; TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION; TECHNICAL SUBJECTS COVERED BY FORMER USPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS; TRANSPORTING; WELDING; WORKING BY LASER BEAM

Disclosed is a movable microchamber system with a gas curtain. The movable microchamber system includes a movable stage assembly which supports a substrate to be treated and an upper member having a light-access feature. The movable stage assembly is arranged relating to the upper member to form the microchamber and a microchamber periphery gap. An active gas is supplied into the microchamber periphery gap to form a gas curtain in the adjacent outside of the microchamber. The gas curtain practically prevents the reaction gas of ambient environment from being supplied into the microchamber when the movable stage assembly moves relating to the upper member.