SYSTEM AND METHOD FOR CONTROLLING A THERMAL ARRAY
A thermal system includes a base member, a two-phase fluid, a tuning heater, and a chuck. The base member includes at least one fluid passageway. The two-phase fluid is disposed within the fluid passageway. A pressure of the two-phase fluid is controlled such that the two-phase fluid provides at lea...
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Main Authors | , , |
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Format | Patent |
Language | English Korean |
Published |
19.05.2014
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Subjects | |
Online Access | Get full text |
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