POLYCRYSTALLINE SILICON PORTION AND METHOD FOR BREAKING A SILICON BODY

• Main Authors: FABRY LASZLO, HUBER CHRISTIAN, GRUEBL PETER
• Format: Patent
• Language: English; Korean
• Published: 01.07.2013
• Subjects: CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY; CHEMISTRY; COMPOUNDS THEREOF; CUTTING; CUTTING-OUT; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; HAND CUTTING TOOLS; INORGANIC CHEMISTRY; METALLURGY; NON-METALLIC ELEMENTS; PERFORATING; PERFORMING OPERATIONS; PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL; PUNCHING; SEVERING; SEVERING BY MEANS OTHER THAN CUTTING; STAMPING-OUT; TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION; TECHNICAL SUBJECTS COVERED BY FORMER USPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS; THEIR RELEVANT APPARATUS; TRANSPORTING

PURPOSE: A polycrystalline silicon portion and a method for breaking a silicon body are provided to produce polycrystalline silicon with very low contamination. CONSTITUTION: A polycrystalline silicon portion has at least one break or cut surface including metal contamination of 0.07-1 ng/cm^2. A method for breaking silicon body, preferably a rod made of polycrystalline silicon, comprises the steps of: determination of a lowest bend frequency of the silicon body, and excitation of the silicon body in its lowest bend frequency by a vibration exciter. The excitation step takes place at an excitation site of the silicon body such that the silicon body breaks at the excitation site. [Reference numerals] (AA) Silicone rod