CLEANING SOLUTION COMPOSITION FOR FLAT DISPLAY DEVICE AND CLEANING METHOD OF FLAT PANEL DISPLAY

• Main Authors: SHIN, HYE RA, BANG, SOON HONG, YOON, HYO JOONG
• Format: Patent
• Language: English; Korean
• Published: 27.02.2013
• Subjects: ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES; CANDLES; CHEMISTRY; DETERGENT COMPOSITIONS; DETERGENTS; FATTY ACIDS THEREFROM; METALLURGY; RECOVERY OF GLYCEROL; RESIN SOAPS; SOAP OR SOAP-MAKING; USE OF SINGLE SUBSTANCES AS DETERGENTS

PURPOSE: A cleaning liquid composition for manufacturing a flat panel display is provided to have excellent particle removing force and to have excellent anti-corrosion effect for aluminum or aluminum alloy which is formed on a substrate. CONSTITUTION: A cleaning composition for a flat panel display comprises an oxyalkylamine compound indicated in chemical formula 1, an organophosphorus compound or a salt thereof, a sulfur-containing compound, a water-soluble polar solvent, and water. In chemical formula 1, n is an integer from 1-5; R1 is an alkyl, acryl, hydroxyalkyl, aryl, alkoxyalkyl, thiol-containing alkyl, or ether-containing substituent; each of R2 and R3 is an alkyl, acryl, hydroxyalkyl, aryl, aminoalkyl, alkoxy alkyl, hydroxyl, or amino group. When each of R2 and R3 has a C1-8, R2 and R3 can form a cyclic structure together with nitrogen which is bonded with R2 and R3.