VACUUM SYSTEM
The invention provides a vacuum system (12) comprising a plurality of vacuum chambers (14, 16, 18, 20) connected in series and a vacuum pumping arrangement (10) for differential pumping the chambers. The vacuum pumping arrangement comprises a primary pump (22) having an inlet (23) connected for pump...
Saved in:
| Main Author | |
|---|---|
| Format | Patent |
| Language | English Korean |
| Published |
08.06.2012
|
| Subjects | |
| Online Access | Get full text |
Cover
Loading…
| Abstract | The invention provides a vacuum system (12) comprising a plurality of vacuum chambers (14, 16, 18, 20) connected in series and a vacuum pumping arrangement (10) for differential pumping the chambers. The vacuum pumping arrangement comprises a primary pump (22) having an inlet (23) connected for pumping a first vacuum chamber (14) and an outlet (25) for exhausting at or around atmosphere, a booster pump (24) having an inlet (27) connected for pumping a second vacuum chamber (16) and an outlet (29) connected to the inlet (23) of the primary pump; and a secondary pump (26, 28) having an inlet (31, 33) connected for pumping a third vacuum chamber (18, 20) and an outlet (35, 37) connected to the inlet (27) of the booster pump. |
|---|---|
| AbstractList | The invention provides a vacuum system (12) comprising a plurality of vacuum chambers (14, 16, 18, 20) connected in series and a vacuum pumping arrangement (10) for differential pumping the chambers. The vacuum pumping arrangement comprises a primary pump (22) having an inlet (23) connected for pumping a first vacuum chamber (14) and an outlet (25) for exhausting at or around atmosphere, a booster pump (24) having an inlet (27) connected for pumping a second vacuum chamber (16) and an outlet (29) connected to the inlet (23) of the primary pump; and a secondary pump (26, 28) having an inlet (31, 33) connected for pumping a third vacuum chamber (18, 20) and an outlet (35, 37) connected to the inlet (27) of the booster pump. |
| Author | STONES IAN DAVID |
| Author_xml | – fullname: STONES IAN DAVID |
| BookMark | eNrjYmDJy89L5WTgDXN0Dg31VQiODA5x9eVhYE1LzClO5YXS3AzKbq4hzh66qQX58anFBYnJqXmpJfHeQUYGhkYGBqaWpgaGjsbEqQIA6UcfVg |
| ContentType | Patent |
| DBID | EVB |
| DatabaseName | esp@cenet |
| DatabaseTitleList | |
| Database_xml | – sequence: 1 dbid: EVB name: esp@cenet url: http://worldwide.espacenet.com/singleLineSearch?locale=en_EP sourceTypes: Open Access Repository |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Medicine Chemistry Sciences |
| ExternalDocumentID | KR20120059501A |
| GroupedDBID | EVB |
| ID | FETCH-epo_espacenet_KR20120059501A3 |
| IEDL.DBID | EVB |
| IngestDate | Fri Jul 19 16:10:24 EDT 2024 |
| IsOpenAccess | true |
| IsPeerReviewed | false |
| IsScholarly | false |
| Language | English Korean |
| LinkModel | DirectLink |
| MergedId | FETCHMERGED-epo_espacenet_KR20120059501A3 |
| Notes | Application Number: KR20127003613 |
| OpenAccessLink | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20120608&DB=EPODOC&CC=KR&NR=20120059501A |
| ParticipantIDs | epo_espacenet_KR20120059501A |
| PublicationCentury | 2000 |
| PublicationDate | 20120608 |
| PublicationDateYYYYMMDD | 2012-06-08 |
| PublicationDate_xml | – month: 06 year: 2012 text: 20120608 day: 08 |
| PublicationDecade | 2010 |
| PublicationYear | 2012 |
| RelatedCompanies | EDWARDS LIMITED |
| RelatedCompanies_xml | – name: EDWARDS LIMITED |
| Score | 2.8320785 |
| Snippet | The invention provides a vacuum system (12) comprising a plurality of vacuum chambers (14, 16, 18, 20) connected in series and a vacuum pumping arrangement... |
| SourceID | epo |
| SourceType | Open Access Repository |
| SubjectTerms | BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY |
| Title | VACUUM SYSTEM |
| URI | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20120608&DB=EPODOC&locale=&CC=KR&NR=20120059501A |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwY2BQMTA1MrdIS0rVNTJLNtI1MTRK1QU1Q4A5Ps3AzCLZItEQvJHW18_MI9TEK8I0gokhB7YXBnxOaDn4cERgjkoG5vcScHldgBjEcgGvrSzWT8oECuXbu4XYuqhBe8eGRgZmBhZqLk62rgH-Lv7Oas7Ott5Ban5BEDlgU8LUwNCRmYEV2JA2By0Acw1zAu1LKUCuVNwEGdgCgObllQgxMGXnCzNwOsPuXhNm4PCFTnkDmdDcVyzCwBvm6Bwa6qsQHBkc4uoryqDs5hri7KELNDce7o147yBkRxiLMbAAO_ipEgwKFikpRpbJKWnmZknJJuZJyRbJwD5KWqJFqjEwdySZJ0syyOAzSQq_tDQDF4gLXt5kIcPAUlJUmioLrEhLkuTA_gcA33hzEQ |
| link.rule.ids | 230,309,783,888,25578,76884 |
| linkProvider | European Patent Office |
| linkToHtml | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwY2BQMTA1MrdIS0rVNTJLNtI1MTRK1QU1Q4A5Ps3AzCLZItEQvJHW18_MI9TEK8I0gokhB7YXBnxOaDn4cERgjkoG5vcScHldgBjEcgGvrSzWT8oECuXbu4XYuqhBe8eGRgZmBhZqLk62rgH-Lv7Oas7Ott5Ban5BEDlgU8LUwNCRmYEV2Mi2AJ207xrmBNqXUoBcqbgJMrAFAM3LKxFiYMrOF2bgdIbdvSbMwOELnfIGMqG5r1iEgTfM0Tk01FchODI4xNVXlEHZzTXE2UMXaG483Bvx3kHIjjAWY2ABdvBTJRgULFJSjCyTU9LMzZKSTcyTki2SgX2UtESLVGNg7kgyT5ZkkMFnkhR-aXkGTo8QX594H08_b2kGLpAUeKmThQwDS0lRaaossFItSZIDhwUAa9B2AQ |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Apatent&rft.title=VACUUM+SYSTEM&rft.inventor=STONES+IAN+DAVID&rft.date=2012-06-08&rft.externalDBID=A&rft.externalDocID=KR20120059501A |