Flexible shower head

PURPOSE: A flexible shower head is provided to improve process uniformity on a front side of a wafer by controlling the generation plasma formed between a shower head plate and a heater block. CONSTITUTION: A shower head supporting unit(10) is formed into a cylindrical shape. A shower head plate(20)...

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Bibliographic Details
Main Author CHOI, NAK GU
Format Patent
LanguageEnglish
Korean
Published 05.06.2012
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:PURPOSE: A flexible shower head is provided to improve process uniformity on a front side of a wafer by controlling the generation plasma formed between a shower head plate and a heater block. CONSTITUTION: A shower head supporting unit(10) is formed into a cylindrical shape. A shower head plate(20) includes a pair of a flexible upper plate(21) and a flexible lower plate(22) to be arranged facing each other. An outer circumference of the shower head plate is combined with a lower portion of the shower head supporting unit. A lifting unit(40) is coupled with the flexible upper plate and the flexible lower plate by using the connection unit. A gauge(60) measures lifting displacement of the lifting unit.
Bibliography:Application Number: KR20100118888