THREE DIMENSIONAL SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME

PURPOSE: A three-dimensional semiconductor device for improving the degree of integration is provided to prevent other structures from being damaged while a cell structure is pattered since a top portion of the cell structure is formed by patterning an upper thin film structure. CONSTITUTION: Provid...

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Bibliographic Details
Main Authors SHIM, JAE JOO, MUN, CHANG SUP, LIM, JONG HEUN, KIM, HYO JUNG, KIM, KYUNG HYUN
Format Patent
LanguageEnglish
Korean
Published 11.05.2012
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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