VACCUM DEPOSITION SOURCES HAVING HEATED EFFUSION ORIFICES
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Published |
06.10.2011
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Online Access | Get full text |
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Author | CONROY CHAD MICHAEL PRIDDY SCOTT WAYNE |
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RelatedCompanies | VEECO INSTRUMENTS INC |
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SubjectTerms | CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION |
Title | VACCUM DEPOSITION SOURCES HAVING HEATED EFFUSION ORIFICES |
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