ELECTROSTATIC CHUCK WITH COMPLIANT COAT
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| Main Authors | , , , |
|---|---|
| Format | Patent |
| Language | English Korean |
| Published |
22.08.2011
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| Subjects | |
| Online Access | Get full text |
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| Author | LAFONTAINE MARVIN RZESZUT RICHARD PUROHIT ASHWIN LEE WILLIAM D |
|---|---|
| Author_xml | – fullname: LAFONTAINE MARVIN – fullname: RZESZUT RICHARD – fullname: LEE WILLIAM D – fullname: PUROHIT ASHWIN |
| BookMark | eNrjYmDJy89L5WRQd_VxdQ4J8g8OcQzxdFZw9gh19lYI9wzxUHD29w3w8XT0CwGyHEN4GFjTEnOKU3mhNDeDsptriLOHbmpBfnxqcUFicmpeakm8d5CRgaGhgYGliZGhhaMxcaoAZ9ombg |
| ContentType | Patent |
| DBID | EVB |
| DatabaseName | esp@cenet |
| Database_xml | – sequence: 1 dbid: EVB name: esp@cenet url: http://worldwide.espacenet.com/singleLineSearch?locale=en_EP sourceTypes: Open Access Repository |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Medicine Chemistry Sciences |
| ExternalDocumentID | KR20110094218A |
| GroupedDBID | EVB |
| ID | FETCH-epo_espacenet_KR20110094218A3 |
| IEDL.DBID | EVB |
| IngestDate | Fri Jul 19 11:28:25 EDT 2024 |
| IsOpenAccess | true |
| IsPeerReviewed | false |
| IsScholarly | false |
| Language | English Korean |
| LinkModel | DirectLink |
| MergedId | FETCHMERGED-epo_espacenet_KR20110094218A3 |
| Notes | Application Number: KR20117016003 |
| OpenAccessLink | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20110822&DB=EPODOC&CC=KR&NR=20110094218A |
| ParticipantIDs | epo_espacenet_KR20110094218A |
| PublicationCentury | 2000 |
| PublicationDate | 20110822 |
| PublicationDateYYYYMMDD | 2011-08-22 |
| PublicationDate_xml | – month: 08 year: 2011 text: 20110822 day: 22 |
| PublicationDecade | 2010 |
| PublicationYear | 2011 |
| RelatedCompanies | AXCELIS TECHNOLOGIES, INC |
| RelatedCompanies_xml | – name: AXCELIS TECHNOLOGIES, INC |
| Score | 2.8009107 |
| SourceID | epo |
| SourceType | Open Access Repository |
| SubjectTerms | BASIC ELECTRIC ELEMENTS COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT CONVERSION OR DISTRIBUTION OF ELECTRIC POWER DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERATION MACHINE TOOLS MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS METAL-WORKING NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS SEMICONDUCTOR DEVICES TRANSPORTING |
| Title | ELECTROSTATIC CHUCK WITH COMPLIANT COAT |
| URI | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20110822&DB=EPODOC&locale=&CC=KR&NR=20110094218A |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfR3LSsNAcKhV1JtWxUeVgBJPwbwak0OQdJOQWvMgrtpb2TwK0mKLjfj7zsZGe-pt2IHZ3YHZee3MANxMSsUq7yc8_sVySc8zU2KFlkvMkuXc0nu6wrijGEZG8KI_jnqjFsyaWpi6T-h33RwRJSpHea_q93rxH8Ry67-Vy7vsHZfmDz61XbFown28gbno9m0vid2YiITYw1SM0l8cujKo0Zwt2OaGNO-07732eV3KYl2p-AewkyC9j-oQWtN5B_ZIM3utA7vhKuWN4Er6lkdw6z15hKbxM3XogAgkQPtSeBvQQCBxmKBTHlGEHHoM175HSSDhjuO_C46H6frxtBNoo-tfnoKgaEXBNFU2M8PUC6VEtmqyyvg4B56uNM6gu4nS-Wb0Bew3EVJV7UK7-vwqL1HFVtlVzZkfZ8t6Bg |
| link.rule.ids | 230,309,786,891,25594,76904 |
| linkProvider | European Patent Office |
| linkToHtml | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV1LS8NAEB5qFetNq-KjakCJp2BeTdNDkHSTkJhXiav2VvIqiGKLjfj3nY2N9tTbsAOzD5id_WZ2ZgBuZqU0LAcz5v9Kc0HNM11ICyUX0qEo5kO1r0opA4phpLlP6sOkP2nBe5MLU9cJ_a6LI6JG5ajvVX1fL_6dWFb9t3J5l73i0PzeoYbFF427jxUw562RYY9jKyY8IYaf8FHyy0MogxbN3ILtAYJCVmnffh6xvJTFulFx9mFnjPI-qgNovc270CFN77Uu7IarkDeSK-1bHsKtHdiEJvEjNalHOOLi-5J78ajLkTgcIyiPKFImPYJrx6bEFXDG6d8Gp36yvjzlGNoI_csT4CSlKFJFFvVM09VCKvFYFVFOWTsHFq7UTqG3SdLZZvYVdFwaBtPAi_xz2Gu8pbLcg3b1-VVeoLmtssv6lH4AQnZ88Q |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Apatent&rft.title=ELECTROSTATIC+CHUCK+WITH+COMPLIANT+COAT&rft.inventor=LAFONTAINE+MARVIN&rft.inventor=RZESZUT+RICHARD&rft.inventor=LEE+WILLIAM+D&rft.inventor=PUROHIT+ASHWIN&rft.date=2011-08-22&rft.externalDBID=A&rft.externalDocID=KR20110094218A |