BORON-CONTAINING HYDROGEN SILSESQUIOXANE POLYMER, INTEGRATED CIRCUIT DEVICE FORMED USING THE SAME, AND ASSOCIATED METHODS

PURPOSE: A boron-containing hydrogen silsesquioxane polymer is provided to form insulating structures while removing or reducing the discharge of undesirable by-products. CONSTITUTION: A composition comprises a boron-containing hydrogen silsesquioxane polymer having a structure that includes silicon...

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Bibliographic Details
Main Author LIM, SANG HAK
Format Patent
LanguageEnglish
Korean
Published 08.02.2011
Subjects
BASIC ELECTRIC ELEMENTS
CHEMISTRY
COMPOSITIONS BASED THEREON
COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
METALLURGY
ORGANIC MACROMOLECULAR COMPOUNDS
SEMICONDUCTOR DEVICES
THEIR PREPARATION OR CHEMICAL WORKING-UP
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Summary:PURPOSE: A boron-containing hydrogen silsesquioxane polymer is provided to form insulating structures while removing or reducing the discharge of undesirable by-products. CONSTITUTION: A composition comprises a boron-containing hydrogen silsesquioxane polymer having a structure that includes silicon-oxygen-silicon units and oxygen-boron-oxygen linkages in which the boron is a trivalent, wherein two silicon-oxygen-silicon units are covalently bound by an oxygen-boron-oxygen linkage therebetween. The boron is present in the boron-containing hydrogen silsesquioxane polymer in an amount of approximately 0.5 to 5 mol %.
Bibliography:Application Number: KR20090091323