APPARATUS FOR DISPENSING A GAS, METHOD OF REDUCING VENTILATION GAS REQUIREMENTS OF A GAS CABINET, AND METHOD OF OPERATING A GAS CABINET

A method of reducing ventilation gas flow rate through a gas cabinet comprising a gas source vessel and a gas delivery system comprising a gas cabinet.

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Bibliographic Details
Main Authors OLANDER W. KARL, WANG LUPING, DONATUCCI MATTHEW B, WODJENSKI MICHAEL J
Format Patent
LanguageEnglish
Korean
Published 16.12.2010
Subjects
BASIC ELECTRIC ELEMENTS
BLASTING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED,LIQUEFIED, OR SOLIDIFIED GASES
FIXED-CAPACITY GAS-HOLDERS
HEATING
LIGHTING
MECHANICAL ENGINEERING
SEMICONDUCTOR DEVICES
STORING OF DISTRIBUTING GASES OR LIQUIDS
VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED ORSOLIDIFIED GASES
WEAPONS
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Abstract A method of reducing ventilation gas flow rate through a gas cabinet comprising a gas source vessel and a gas delivery system comprising a gas cabinet.
AbstractList A method of reducing ventilation gas flow rate through a gas cabinet comprising a gas source vessel and a gas delivery system comprising a gas cabinet.
Author OLANDER W. KARL
DONATUCCI MATTHEW B
WANG LUPING
WODJENSKI MICHAEL J
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Snippet A method of reducing ventilation gas flow rate through a gas cabinet comprising a gas source vessel and a gas delivery system comprising a gas cabinet.
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SubjectTerms BASIC ELECTRIC ELEMENTS
BLASTING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED,LIQUEFIED, OR SOLIDIFIED GASES
FIXED-CAPACITY GAS-HOLDERS
HEATING
LIGHTING
MECHANICAL ENGINEERING
SEMICONDUCTOR DEVICES
STORING OF DISTRIBUTING GASES OR LIQUIDS
VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED ORSOLIDIFIED GASES
WEAPONS
Title APPARATUS FOR DISPENSING A GAS, METHOD OF REDUCING VENTILATION GAS REQUIREMENTS OF A GAS CABINET, AND METHOD OF OPERATING A GAS CABINET
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