APPARATUS FOR TESTING SEMICONDUCTOR DEVICE AND METHOD FOR TESTING SEMICONDUCTOR DEVICE
PURPOSE: An apparatus for testing a semiconductor device and a method for testing the semiconductor device are provided to implement a heating and cooling test environment of inside a chamber by detecting a predetermined temperature. CONSTITUTION: A chamber has a constant space. A plurality of semic...
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| Main Authors | , , , , |
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| Format | Patent |
| Language | English Korean |
| Published |
26.05.2010
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| Subjects | |
| Online Access | Get full text |
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| Abstract | PURPOSE: An apparatus for testing a semiconductor device and a method for testing the semiconductor device are provided to implement a heating and cooling test environment of inside a chamber by detecting a predetermined temperature. CONSTITUTION: A chamber has a constant space. A plurality of semiconductor devices(50) are located in the chamber. A temperature conversion module is connected to the chamber. The temperature conversion module heats and cools the chamber. The internal space of the chamber keeps a constant temperature. The control module(400) transmits an electric signal to the temperature conversion module. The control module selectively heats and cools the internal space of the chamber. |
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| AbstractList | PURPOSE: An apparatus for testing a semiconductor device and a method for testing the semiconductor device are provided to implement a heating and cooling test environment of inside a chamber by detecting a predetermined temperature. CONSTITUTION: A chamber has a constant space. A plurality of semiconductor devices(50) are located in the chamber. A temperature conversion module is connected to the chamber. The temperature conversion module heats and cools the chamber. The internal space of the chamber keeps a constant temperature. The control module(400) transmits an electric signal to the temperature conversion module. The control module selectively heats and cools the internal space of the chamber. |
| Author | KIM, MIN WOO MIN, BYUNG RONG HWANG, DEOG JONG LEE, BAE KI YUN, SANG HAN |
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| Notes | Application Number: KR20080114213 |
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| PublicationDecade | 2010 |
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| RelatedCompanies | SAMSUNG ELECTRONICS CO., LTD SEMI. LINE, INC |
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| Snippet | PURPOSE: An apparatus for testing a semiconductor device and a method for testing the semiconductor device are provided to implement a heating and cooling test... |
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| SubjectTerms | MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS TESTING |
| Title | APPARATUS FOR TESTING SEMICONDUCTOR DEVICE AND METHOD FOR TESTING SEMICONDUCTOR DEVICE |
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