APPARATUS FOR TESTING SEMICONDUCTOR DEVICE AND METHOD FOR TESTING SEMICONDUCTOR DEVICE

PURPOSE: An apparatus for testing a semiconductor device and a method for testing the semiconductor device are provided to implement a heating and cooling test environment of inside a chamber by detecting a predetermined temperature. CONSTITUTION: A chamber has a constant space. A plurality of semic...

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Bibliographic Details
Main Authors KIM, MIN WOO, MIN, BYUNG RONG, LEE, BAE KI, HWANG, DEOG JONG, YUN, SANG HAN
Format Patent
LanguageEnglish
Korean
Published 26.05.2010
Subjects
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
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Summary:PURPOSE: An apparatus for testing a semiconductor device and a method for testing the semiconductor device are provided to implement a heating and cooling test environment of inside a chamber by detecting a predetermined temperature. CONSTITUTION: A chamber has a constant space. A plurality of semiconductor devices(50) are located in the chamber. A temperature conversion module is connected to the chamber. The temperature conversion module heats and cools the chamber. The internal space of the chamber keeps a constant temperature. The control module(400) transmits an electric signal to the temperature conversion module. The control module selectively heats and cools the internal space of the chamber.
Bibliography:Application Number: KR20080114213