RACE TRACK CONFIGURATION AND METHOD FOR WAFERING SILICON SOLAR SUBSTRATES

PURPOSE: A racetrack structure and a method for manufacturing a silicon solar substrate wafer are provided to manufacture a free-stand film from a bulk work-piece using accelerating system and a layer transfer technique. CONSTITUTION: A racetrack structure(1000) transfers one or more work-piece. An...

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Bibliographic Details
Main Authors HENLEY FRANCOIS J, BRAILOVE ADAM
Format Patent
LanguageEnglish
Korean
Published 05.03.2010
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:PURPOSE: A racetrack structure and a method for manufacturing a silicon solar substrate wafer are provided to manufacture a free-stand film from a bulk work-piece using accelerating system and a layer transfer technique. CONSTITUTION: A racetrack structure(1000) transfers one or more work-piece. An accelerator-based ion implanter(100N) is combined to the racetrack structure through an end station(101N). The accelerator-based ion implanter forms a cleaving area on the work-piece. Cleave modules(1211, 1212) perform a cleave process to separate a free-stand film from the word-piece along the cleaving area. Output ports(1311, 1312) are combined to the cleave modules in order to output the free-stand film.
Bibliography:Application Number: KR20090078839