LIQUID LENS AND METHOD FOR FABRICATING THE SAME

A liquid lens and a method for fabricating the same are provided to maintain the high insulation property resistant a dielectric breakdown by using the interface of a thermal oxide film and a silicon. In a liquid lens and a method for fabricating the same, an electrode(32) is formed at a lower part...

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Main Authors CHOI, WOO BEOM, SEO, SANG WON, BAE, SE JIN, PARK, SANG YONG, KANG, MOON SIK, SUNG, MAN YOUNG
Format Patent
LanguageEnglish
Published 05.08.2009
Subjects
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
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Abstract A liquid lens and a method for fabricating the same are provided to maintain the high insulation property resistant a dielectric breakdown by using the interface of a thermal oxide film and a silicon. In a liquid lens and a method for fabricating the same, an electrode(32) is formed at a lower part glass wafer(31). A top glass wafer(41) is attached on a medium plate silicon wafer, and a medium plate silicon wafer comprises a chamber, a first and a second insulating layers(37,38), and a bonding layer. A chamber is filled up with a solution, and the first and second insulating layer are formed on the surface of the chamber. The bonding layer is formed inside of the chamber where first and second insulating layer are formed.
AbstractList A liquid lens and a method for fabricating the same are provided to maintain the high insulation property resistant a dielectric breakdown by using the interface of a thermal oxide film and a silicon. In a liquid lens and a method for fabricating the same, an electrode(32) is formed at a lower part glass wafer(31). A top glass wafer(41) is attached on a medium plate silicon wafer, and a medium plate silicon wafer comprises a chamber, a first and a second insulating layers(37,38), and a bonding layer. A chamber is filled up with a solution, and the first and second insulating layer are formed on the surface of the chamber. The bonding layer is formed inside of the chamber where first and second insulating layer are formed.
Author SUNG, MAN YOUNG
CHOI, WOO BEOM
PARK, SANG YONG
KANG, MOON SIK
SEO, SANG WON
BAE, SE JIN
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OPTICS
PHYSICS
Title LIQUID LENS AND METHOD FOR FABRICATING THE SAME
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