LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

A lithographic apparatus and a device manufacturing method are provided to improve robustness of iterative learning control systems on set point variations. A lithographic apparatus includes a processing device which determines a feed forward transfer function of a control system. The processing dev...

Full description

Saved in:
Bibliographic Details
Main Authors HOUBEN DENNIS ANDREAS PETRUS HUBERTINA, VAN DE MOLENGRAFT MARINUS JACOBUS GERARDUS, BAGGEN CONSTANT PAUL MARIE JOZEF, BAGGEN MARK CONSTANT JOHANNES, VAN DEN BIGGELAAR PETRUS MARINUS CHRISTIANUS MARIA, TSO YIN TIM, HEERTJES MARCEL FRANCOIS, KAMIDI RAMIDIN IZAIR
Format Patent
LanguageEnglish
Published 20.08.2008
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
Online AccessGet full text

Cover

Abstract A lithographic apparatus and a device manufacturing method are provided to improve robustness of iterative learning control systems on set point variations. A lithographic apparatus includes a processing device which determines a feed forward transfer function of a control system. The processing device, which learns repeatedly an output signal(fff) of the control system using iterative learning control on a predetermined set point signal(r) and determines a relation between the learned feed forward output signal and the predetermined set point signal, includes program instructions for applying the relation as the feed forward transfer function of the control system.
AbstractList A lithographic apparatus and a device manufacturing method are provided to improve robustness of iterative learning control systems on set point variations. A lithographic apparatus includes a processing device which determines a feed forward transfer function of a control system. The processing device, which learns repeatedly an output signal(fff) of the control system using iterative learning control on a predetermined set point signal(r) and determines a relation between the learned feed forward output signal and the predetermined set point signal, includes program instructions for applying the relation as the feed forward transfer function of the control system.
Author BAGGEN MARK CONSTANT JOHANNES
TSO YIN TIM
KAMIDI RAMIDIN IZAIR
BAGGEN CONSTANT PAUL MARIE JOZEF
HOUBEN DENNIS ANDREAS PETRUS HUBERTINA
VAN DEN BIGGELAAR PETRUS MARINUS CHRISTIANUS MARIA
HEERTJES MARCEL FRANCOIS
VAN DE MOLENGRAFT MARINUS JACOBUS GERARDUS
Author_xml – fullname: HOUBEN DENNIS ANDREAS PETRUS HUBERTINA
– fullname: VAN DE MOLENGRAFT MARINUS JACOBUS GERARDUS
– fullname: BAGGEN CONSTANT PAUL MARIE JOZEF
– fullname: BAGGEN MARK CONSTANT JOHANNES
– fullname: VAN DEN BIGGELAAR PETRUS MARINUS CHRISTIANUS MARIA
– fullname: TSO YIN TIM
– fullname: HEERTJES MARCEL FRANCOIS
– fullname: KAMIDI RAMIDIN IZAIR
BookMark eNrjYmDJy89L5WQw8_EM8fB3D3IM8PB0VnAMCHAMcgwJDVZw9HNRcHEN83R2VfB19At1c3QOCQ3y9HNX8HUFqnfhYWBNS8wpTuWF0twMym6uIc4euqkF-fGpxQWJyal5qSXx3kFGBgYWBgbmZuaWJo7GxKkCAMoDKrQ
ContentType Patent
DBID EVB
DatabaseName esp@cenet
DatabaseTitleList
Database_xml – sequence: 1
  dbid: EVB
  name: esp@cenet
  url: http://worldwide.espacenet.com/singleLineSearch?locale=en_EP
  sourceTypes: Open Access Repository
DeliveryMethod fulltext_linktorsrc
Discipline Medicine
Chemistry
Sciences
ExternalDocumentID KR20080076794A
GroupedDBID EVB
ID FETCH-epo_espacenet_KR20080076794A3
IEDL.DBID EVB
IngestDate Fri Sep 20 10:15:46 EDT 2024
IsOpenAccess true
IsPeerReviewed false
IsScholarly false
Language English
LinkModel DirectLink
MergedId FETCHMERGED-epo_espacenet_KR20080076794A3
Notes Application Number: KR20080013381
OpenAccessLink https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20080820&DB=EPODOC&CC=KR&NR=20080076794A
ParticipantIDs epo_espacenet_KR20080076794A
PublicationCentury 2000
PublicationDate 20080820
PublicationDateYYYYMMDD 2008-08-20
PublicationDate_xml – month: 08
  year: 2008
  text: 20080820
  day: 20
PublicationDecade 2000
PublicationYear 2008
RelatedCompanies ASML NETHERLANDS B.V
RelatedCompanies_xml – name: ASML NETHERLANDS B.V
Score 2.702748
Snippet A lithographic apparatus and a device manufacturing method are provided to improve robustness of iterative learning control systems on set point variations. A...
SourceID epo
SourceType Open Access Repository
SubjectTerms BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
Title LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
URI https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20080820&DB=EPODOC&locale=&CC=KR&NR=20080076794A
hasFullText 1
inHoldings 1
isFullTextHit
isPrint
link http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV3dT4MwEL_MadQ3nRo_piHR8EbcBAZ7IKZrQXDyEYRlb0sZJTExbHEY_31bNnRPe2va5nJt-uvdtfcB8NDXc9rPjaFSZFmmaEynikl7PUUzc8Y14PxpmNXZPoOBm2qvU33ags8mFqbOE_pTJ0fkiJpzvFf1fb38f8QitW_l6jH74F2LZyexiNxYx6aQaDIZWXYUkhDLGFvjWA7i9Ri32fnxQ3uwLxRpkWnfnoxEXMpyW6g4J3AQcXpldQotVnbgCDe11zpw6G--vHlzg77VGQzevMQNX2IUuR6WUBShGCXpu4QCIhF74mFb8lGQOggnqXBykHybzyfncO_YCXYVzsDsb72zcbzNrXoB7XJRskuQ5nNDo4bJ1EJUx9AKSk2VcYDRIjd1nQ6voLuL0vXu4Rs4XjtDCOh0oV19fbNbLnGr7K7eqF9XFX9I
link.rule.ids 230,309,786,891,25594,76906
linkProvider European Patent Office
linkToHtml http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV3dT4MwEL_MaZxvOjV-TCXR8EbcBwz2QEzXguAGIwjL3pYCJTExbHEY_31btume9ta0zeXa9Ne7a-8D4KmjZbST6QMlT5JEUZlGFYO224pqZIxrwFl3kFTZPv2-E6tvM21Wg89tLEyVJ_SnSo7IEZVyvJfVfb38f8QilW_l6jn54F2LFzsyiby1jg0h0WQyNK1gQiZYxtgchbIfrse4zc6PHzqAQ13k5xXK03Qo4lKWu0LFPoWjgNMryjOosaIJDbytvdaEY2_z5c2bG_StzqE_diNn8hqiwHGxhIIAhSiK3yXkE4lYUxdbkof82EY4ioWTg-RZfD65gEfbirCjcAbmf-udj8JdbnuXUC8WBbsCKU11leoG6-WiOoaaU2r0GAcYzTND0-jgGlr7KN3sH36AhhN54_nY9Ue3cLJ2jBAwakG9_Ppmd1z6lsl9tWm_cy-CNQ
openUrl ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Apatent&rft.title=LITHOGRAPHIC+APPARATUS+AND+DEVICE+MANUFACTURING+METHOD&rft.inventor=HOUBEN+DENNIS+ANDREAS+PETRUS+HUBERTINA&rft.inventor=VAN+DE+MOLENGRAFT+MARINUS+JACOBUS+GERARDUS&rft.inventor=BAGGEN+CONSTANT+PAUL+MARIE+JOZEF&rft.inventor=BAGGEN+MARK+CONSTANT+JOHANNES&rft.inventor=VAN+DEN+BIGGELAAR+PETRUS+MARINUS+CHRISTIANUS+MARIA&rft.inventor=TSO+YIN+TIM&rft.inventor=HEERTJES+MARCEL+FRANCOIS&rft.inventor=KAMIDI+RAMIDIN+IZAIR&rft.date=2008-08-20&rft.externalDBID=A&rft.externalDocID=KR20080076794A