PROBE UNIT AND INSPECTION APPARATUS

• Main Authors: NAKAYAMA YOSHIMI, MIURA KAZUYOSHI
• Format: Patent
• Language: English
• Published: 22.07.2008
• Subjects: MEASURING; MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES; PHYSICS; TESTING

A probe unit and an inspection apparatus are provided to stably fix an FPC(Flexible Printed Circuit) plate and an FPC cable and to prevent a guide film from being peeled although a probe assembly is slightly in contact with the guide film. A probe unit is used for inspecting an inspection target plate. The probe unit includes a probe assembly(24) to apply an inspection signal by being electrically connected to an electrode of a circuit of the inspection target plate and a connection cable unit(25) electrically connected to the probe assembly and external devices. A guide film(50) is formed by covering an FPC(Flexible Printed Circuit)(46) being in contact with a probe unit of a base unit of the probe assembly. The guide film includes a plurality of guide holes(51) and a bending unit. The guide holes are formed at places matching to each terminal by the same number of terminals of the FPC cable. The bending unit is formed at a position to be matched with an edge part of an end side peripheral portion of the FPC plate.