RETICLE STOCKER

• Main Authors: LEE, HYUN WOO, KIM, YANG HYUN, SHIN, YONG SOO, PARK, CHUL JUN, LIM, TAE WOONG, KIM, JIN GI
• Format: Patent
• Language: English
• Published: 05.10.2007
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

A reticle storage apparatus is provided to shorten a time for transferring reticles by automatically transferring a reticle cassette for storing the reticles. A reticle storage module(130) is disposed inside a main body(110) in order to store a plurality of reticles in a vertical state. A reticle transfer module is formed to transfer the reticles of the reticle storage module to the outside of the main body. A load port module(150) is disposed at the outside of the main body. A reticle cassette is loaded into the load port module. The reticles transferred by the reticle transfer module are loaded into the reticle cassette. A reticle cassette transfer module(160) is formed to transfer the reticle cassette loaded in the load port module. The load port module includes a manual port disposed at a lower part of one side of the main body in order to transfer the reticle cassette in a manual manner, and an OHT port disposed at an upper part of one side of the main body to transfer automatically the reticle cassette. The reticle cassette transfer module is formed to transfer automatically the reticle cassette loaded into the OHT port.