SEMICONDUCTOR DEVICES HAVING A PLANARIZATION ISOLATING LAYER AND METHODS OF FORMING THE SAME

• Main Authors: JEONG, WON CHEOL, PARK, JAE HYUN, OH, JAE HEE
• Format: Patent
• Language: English
• Published: 24.01.2006
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INFORMATION STORAGE; PHYSICS; SEMICONDUCTOR DEVICES; STATIC STORES

A semiconductor device includes at least one phase-change pattern disposed on a semiconductor substrate. A planarized capping layer, a planarized protecting layer, and a planarized insulating layer are sequentially stacked to surround sidewalls of the at least one phase-change pattern. An interconne...