CLEANING METHOD FOR ATMOSPHERIC PRESSURE PLASMA

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Bibliographic Details
Main Authors LEE, JONG HO, HWANG, JEONG HO, SOHN, MIN KYU, SONG, YOUNG SIK
Format Patent
LanguageEnglish
Published 07.07.2005
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
Online AccessGet full text

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Author LEE, JONG HO
SOHN, MIN KYU
SONG, YOUNG SIK
HWANG, JEONG HO
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SubjectTerms BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
Title CLEANING METHOD FOR ATMOSPHERIC PRESSURE PLASMA
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