COMPOSITION FOR DEPOSITING ONE OR MORE METAL OR METAL ALLOY FILMS ON SUBSTRATE BY COMPRISING CATALYST, NANO-SIZED SUPPORTS AND WATER SOLUBLE OR DISPERSIBLE ORGANIC COMPOUNDS AND DEPOSITION METHOD USING THE SAME
PURPOSE: To provide an aqueous catalyst composition of which aqueous catalyst has particles having high surface area to deposit a metal or metal alloy ultra-thin film on a substrate, and a method for depositing the metal or metal alloy ultra-thin film on the substrate using the aqueous catalyst comp...
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Main Authors | , |
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Format | Patent |
Language | English Korean |
Published |
06.01.2005
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Edition | 7 |
Subjects | |
Online Access | Get full text |
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