Novel Methacrylates Having Lactone Structure Polymers Photoresist Compositions and Patterning Process

• Main Authors: KINSHO TAKESHI, WATANABE TAKERU, HASEGAWA KOJI
• Format: Patent
• Language: English; Korean
• Published: 19.03.2003
• Edition: 7
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; CHEMISTRY; CINEMATOGRAPHY; COMPOSITIONS BASED THEREON; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; HETEROCYCLIC COMPOUNDS; HOLOGRAPHY; MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVINGCARBON-TO-CARBON UNSATURATED BONDS; MATERIALS THEREFOR; METALLURGY; ORGANIC CHEMISTRY; ORGANIC MACROMOLECULAR COMPOUNDS; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; SEMICONDUCTOR DEVICES; THEIR PREPARATION OR CHEMICAL WORKING-UP

PURPOSE: To provide a polymer having high transparency, especially at excimer laser exposure wavelength. CONSTITUTION: The (meth)acrylate compound giving the polymer is shown by the general formula (1) (where, R¬1 is H or CH3, R¬2 and R¬3 are each H or an alkyl; X is a group forming a norbornane ring, bicyclo £2. 2. 2| octane ring, 7-oxanorbornane ring or cycohexane ring; and the dotted line indicates binding the structure and the γ-butylolactone ring structure to each other). 본 발명은 화학식 1로 표시되는 (메트)아크릴레이트 화합물. 식 중, R은 H 또는 CH를 나타내며, R, R은 H 또는 알킬기를 나타내며, X는 노르보르난환, 비시클로[2.2.2]옥탄환, 7-옥사노르보르난환, 또는 시클로헥산환 구조를 형성하는 기를 나타내며, 점선은 이 구조와 γ-부티로락톤환 구조를 결합한다. 본 발명의 중합체는 투명성, 특히 엑시머 레이저 노광 파장에서의 투명성이 우수하다.