APPARATUS FOR INSPECTING SEMICONDUCTOR HAVING DEVICE FOR CLEANING TIP OF PROBE CARD AND METHOD FOR CLEAING TIP THEREOF
An apparatus for inspecting a semiconductor and a method for automatically cleaning the tip of a probe card may include an inspection chamber having a probe card for inspecting a wafer, and a chemical-wetting chamber for applying a chemical agent to a cleaning member. The inspection chamber and the...
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Main Authors | , , , , |
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Format | Patent |
Language | English |
Published |
12.04.2007
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Subjects | |
Online Access | Get full text |
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