APPARATUS FOR INSPECTING SEMICONDUCTOR HAVING DEVICE FOR CLEANING TIP OF PROBE CARD AND METHOD FOR CLEAING TIP THEREOF

• Main Authors: KIM, DUK KYEOM, MOON, BYUNG JUN, CHOI, JI MAN, LEE, IN CHEOL, NAM, JU HYUN
• Format: Patent
• Language: English
• Published: 12.04.2007
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

An apparatus for inspecting a semiconductor and a method for automatically cleaning the tip of a probe card may include an inspection chamber having a probe card for inspecting a wafer, and a chemical-wetting chamber for applying a chemical agent to a cleaning member. The inspection chamber and the...