OPTICAL INSPECTION TOOLS INCLUDING LENS UNIT WITH AT LEAST A PAIR OF BEAM PATHS THEREIN AND METHODS OF DETECTING SURFACE DEFECTS OF A SUBSTRATE USING THE SAME

• Main Authors: JUN, CHUNG SAM, KIM, SANG HEE, LEE, DONG CHUN, KIM, IK CHUL, KIM, JONG AN
• Format: Patent
• Language: English
• Published: 02.01.2007
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

An optical inspection tools having a lens unit with at least one pair of beam paths therein and a method for detecting surface defects of a substrate using the same are provided to improve resolution of optical testing equipments by employing a first beam path and a second beam path in the lens unit...