METHOD OF OZONE HIGH PRESSURE OXIDATION

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Bibliographic Details
Main Authors KOO, JIN-KEUN, YU, BYUNG-KON, CHON, CHI-HOON
Format Patent
LanguageEnglish
Published 01.06.1998
Edition6
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
Online AccessGet full text

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Author CHON, CHI-HOON
YU, BYUNG-KON
KOO, JIN-KEUN
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SubjectTerms BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
Title METHOD OF OZONE HIGH PRESSURE OXIDATION
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