PRODUCTION OF ELECTRICALLY CONDUCTIVE PLASMA-POLYMERIZED FILM

• Main Authors: MITAKE TAKAYOSHI, HAMA KAZUO
• Format: Patent
• Language: English
• Published: 07.11.1988
• Subjects: BASIC ELECTRIC ELEMENTS; CABLES; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; CHEMISTRY; COMPOSITIONS BASED THEREON; CONDUCTORS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INSULATORS; MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONSONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS; METALLURGY; ORGANIC MACROMOLECULAR COMPOUNDS; PRINTED CIRCUITS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING ORDIELECTRIC PROPERTIES; SEMICONDUCTOR DEVICES; THEIR PREPARATION OR CHEMICAL WORKING-UP

PURPOSE:To form an electrically conductive plasma-polymerized film on a surface of an insulating specimen, by placing inorganic salts on a high-frequency electrode and a specimen on a ground electrode, introducing vapor of a 5-membered cyclic organic compound into a reactor and generating glow discharge between both electrodes. CONSTITUTION:A ground electrode 3 and a high-frequency electrode 5 are disposed facing each other in a reactor 1. A specimen 4 is placed on a face of the ground electrode facing with the high-frequency electrode and inorganic salts 14 are attached as a doping agent on a surface opposite to said ground electrode. Vapor of a 5-membered cyclic organic compound is introduced from an external source into said reactor and ejected in the form of a shower from the inside of the high-frequency electrode toward the ground electrode 3. A high-frequency power source 10 is connected to the high-frequency electrode 5 and glow discharge is generated between said electrodes to form an electrically conductive plasma-polymerized film on a surface of the specimen 4.