SEMICONDUCTOR MANUFACTURING EQUIPMENT

• Main Author: ATSUMI KENJI
• Format: Patent
• Language: English
• Published: 30.06.1986
• Edition: 4
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

PURPOSE:To make it possible to close the opening of a processing furnace core tube effectively and to stabilize atmosphere in the core tube, by providing a lid plate, which can be moved in the axial direction at a product drawing rod in the processing furnace core tube, providing a spring, which makes the lid part to contact with the furnace core tube, and further providing a mechanism, which vertically moves the drawing rod. CONSTITUTION:Products 5b, which are mounted on a product receiving table 8b, is moved into a processing core tube 1c by a boat leader 9. WHen a lid plate 14 has passed on the product receiving table 8b, a vertically moving mechanism 10 is operated and lowered until the central axis of a drawing rod 6b is aligned with the central axis of the processing furnace core tube 1c. The boat loader 9 is stopped at a position, where the lid plate 14 and the opening end of the processing furnace core tube 1c are closely contacted by the force of a spring 15. The coupling gap between the drawing rod 6b and the lid plate 14 and the slight gap formed by the irregularities of the opening surface of the processing furnace core tube 1c and the irregularities on the flat plane of the lid plate 14 become outlet ports of a gas 17, which enters in the furnace core tube 1c. Therefore, convection, which is generate in the vicinity of the opening part caused by the inflow of atmosphere outside the processing furnace core tube 1c through the opening part can be suppressed, and the atmosphere in the processing furnace core tube 1c is stabilized.