INSPECTING APPARATUS

PURPOSE:To elevate the reliability of the equipment as a whole with a quick judgement on the propriety based on the results of measurement by providing a plurality of signal giving & taking circuits corresponding to a plurality of connection pins of ICs to be measured to measure characteristic s...

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Bibliographic Details
Main Authors KIMURA KAZUHIKO, NAKAHARA KINICHI, OOYAMA YUUICHI, INOUE FUMIHITO
Format Patent
LanguageEnglish
Published 30.01.1985
Subjects
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
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Summary:PURPOSE:To elevate the reliability of the equipment as a whole with a quick judgement on the propriety based on the results of measurement by providing a plurality of signal giving & taking circuits corresponding to a plurality of connection pins of ICs to be measured to measure characteristic simultaneously. CONSTITUTION:One of D/A conversion outputs of first and second signal generators 31 and 32 determines the high level of a digital signal as one of measuring condition of the connection pin while the other D/A conversion output thereof determines the low level of the digital signal. The first judging circuit 41 judges whether an analog signal as results of measurement at a connection pin Tl or the like is above a specified lower limit value while the second judging circuit 42 judges whether an analog DC signal is below the specified upper limit value or not. The current characteristic of an IC21 to be measured is measured when a specified measuring voltage is applied and based on the results of the measurement, the propriety thereof is examined. This enables measurements of various characteristics of a semiconductor simultaneously thereby enabling the judgement on the propriety thereof based on the measurements for a very short time.
Bibliography:Application Number: JP19830126045