IRRADIATION SYSTEM FOR ELECTRON RAY DEVICE

PURPOSE:To image an electron probe of minute diameter without performing any complicate control or operation by locating the final stage lens of four focusing lenses near a front objective and adjusting the synthetic reduction rate to below a given level. CONSTITUTION:Four focusing lenses (C1-C4) ar...

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Bibliographic Details
Main Author YANAKA TAKASHI
Format Patent
LanguageEnglish
Published 29.07.1985
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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