CONTINUOUS METALLIZING DEVICE FOR MATERIAL TO BE TREATED SUCH AS DISC

• Main Authors: OOGOSHI AKIO, FUJITA YASUROU, UJIHARA TAKASHI
• Format: Patent
• Language: English
• Published: 27.01.1983
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INFORMATION STORAGE; INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; PHYSICS; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

PURPOSE:To metallize discs or the like continuously with a device which occupies a small area, by setting materials to be treated to a pallet provided with a sealing expanded part and carrying the pallet to a vacuum treatment chamber and etc. in the vertical state. CONSTITUTION:Discs 2 as materials to be treated which are freely attachable and detachable are mounted on both sides of a pallet 1 provided with a sealing expanded part 1B, and pallets 1- are carried in the vertical state, and discs 2- are subjected to the metallizing treatment through chambers such as an inlet- side auxiliary vacuum chamber 9 where a seal door or the like is unnecessary, an ion washing chamber 10, a high vacuum chamber 11, a metallizing chamber 3, and outlet-side auxiliary vacuum chambers 12 and 12 continuously. By this constitution where pallets having the seal effect are carried in the vertical state, discs or the like are subjected to the metallizing treatment continuously in a short time with a device which occupies a small area.