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PURPOSE:To detect a position with a high precision, by dividing the surface of a plane plate into n-number of continuous areas to read the position on the plane plate by n-order higher harmonic components and using fundamental wave components to discriminate which area the position exists. CONSTITUT...

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Bibliographic Details
Main Authors TANABE NAOTO, AONO YOSHITAMI, TAKEDA YUKIO
Format Patent
LanguageEnglish
Published 07.07.1983
Subjects
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