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PURPOSE:To detect a position with a high precision, by dividing the surface of a plane plate into n-number of continuous areas to read the position on the plane plate by n-order higher harmonic components and using fundamental wave components to discriminate which area the position exists. CONSTITUT...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
07.07.1983
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Subjects | |
Online Access | Get full text |
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