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PROBLEM TO BE SOLVED: To provide a piezoelectric element with a small size easily by providing the conductive material split in two parts, with one part as an electrode layer and the other as an inert layer such that the inert layer is positioned facing with the inert layer of the adjacent conductiv...

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Bibliographic Details
Main Authors TAMAHASHI KUNIHIRO, MACHIDA OSAMU, DEGUCHI MASANORI, NAGATA JUN, TACHIBANA YOSHIAKI, YAMADA KENJI
Format Patent
LanguageEnglish
Published 02.03.1999
Edition6
Subjects
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Summary:PROBLEM TO BE SOLVED: To provide a piezoelectric element with a small size easily by providing the conductive material split in two parts, with one part as an electrode layer and the other as an inert layer such that the inert layer is positioned facing with the inert layer of the adjacent conductive material layer in a piezoelectric element having a conductive material and a piezoelectric material laminated alternately. SOLUTION: The surface of a conductive layer 23 is coated with a piezoelectric material 22. A conductive material 24 is coated on the upper surface thereof with a different pattern by the same method. Then, they are coated repeatedly to be laminated to a predetermined thickness for forming the basic part of a laminated piezoelectric element on a surface plate 21. By removing the laminated part and depositing an electrode material on the surface plate 21, a piezoelectric element is produced. An individual electrode and a conductive pattern for the external connection are formed on the piezoelectric element, corresponding with the conductive film. The piezoelectric element is fixed on a base 11. The fixed piezoelectric element is slit finely with the same pitch as the individual electrode pitch. Then, the individual electrode and the slit piezoelectric element row are connected. Accordingly, the piezoelectric element can be formed with a small size.
Bibliography:Application Number: JP19970225013