SUBSTRATE DRYING DEVICE

PURPOSE: To provide a substrate drying device which can prevent insufficient drying of substrates by completely removing a cleaning solution from the substrates by sucking a guide section. CONSTITUTION: A guide section 28b is provided with projecting sections 28b1 having slopes for guiding the perip...

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Bibliographic Details
Main Author IKEDA FUMIHIRO
Format Patent
LanguageEnglish
Published 02.04.1996
Edition6
Subjects
BASIC ELECTRIC ELEMENTS
BLASTING
DRYING
DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HEATING
LIGHTING
MECHANICAL ENGINEERING
SEMICONDUCTOR DEVICES
WEAPONS
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Summary:PURPOSE: To provide a substrate drying device which can prevent insufficient drying of substrates by completely removing a cleaning solution from the substrates by sucking a guide section. CONSTITUTION: A guide section 28b is provided with projecting sections 28b1 having slopes for guiding the peripheral sections of substrates W at the time of receiving the substrates W and recessed sections 28b2 for supporting the peripheral sections of the received substrates W. At the central parts of the bottoms of the recessed sections 28b2 , suction holes 28b3 communicated with the suction passage 28b4 of the guide section 28b are formed. The passage 28b4 is communicated with the suction passage 28c1 of a fixed section 28c, and the passage 28c1 is communicated and connected with a suction tube laid on the side face section of a connecting section through the suction passage of the connecting section.
Bibliography:Application Number: JP19940248808