FORMATION OF THIN-FILM WAVEGUIDE ELEMENT
PURPOSE:To form an optically flat reflection end face by lessening the striation at the perpendicular end face of a waveguide. CONSTITUTION:The thin-film optical waveguide is constituted by laminating a core layer 20 consisting of SiON by a plasma CVD method and a clad layer 22 consisting of SiON li...
Saved in:
Main Author | |
---|---|
Format | Patent |
Language | English |
Published |
19.01.1996
|
Edition | 6 |
Subjects | |
Online Access | Get full text |
Cover
Loading…
Be the first to leave a comment!