FORMATION OF THIN-FILM WAVEGUIDE ELEMENT

PURPOSE:To form an optically flat reflection end face by lessening the striation at the perpendicular end face of a waveguide. CONSTITUTION:The thin-film optical waveguide is constituted by laminating a core layer 20 consisting of SiON by a plasma CVD method and a clad layer 22 consisting of SiON li...

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Bibliographic Details
Main Author AOKI MASAKANE
Format Patent
LanguageEnglish
Published 19.01.1996
Edition6
Subjects
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
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