WORKING CONDITION INDICATION EQUIPMENT

• Main Authors: HIROYA MITSURU, NAGUMO HIDEKO, YAMAMOTO HIROSHI
• Format: Patent
• Language: English
• Published: 09.04.1993
• Subjects: BASIC ELECTRIC ELEMENTS; CALCULATING; COMPUTING; CONTROL OR REGULATING SYSTEMS IN GENERAL; CONTROLLING; CONVEYING; COUNTING; DATA PROCESSING SYSTEMS OR METHODS, SPECIALLY ADAPTED FORADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL, SUPERVISORYOR FORECASTING PURPOSES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; HANDLING THIN OR FILAMENTARY MATERIAL; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS; PACKING; PERFORMING OPERATIONS; PHYSICS; PNEUMATIC TUBE CONVEYORS; REGULATING; SEMICONDUCTOR DEVICES; SHOP CONVEYOR SYSTEMS; STORING; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE,COMMERCIAL, FINANCIAL, MANAGERIAL, SUPERVISORY OR FORECASTINGPURPOSES, NOT OTHERWISE PROVIDED FOR; TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING; TRANSPORTING

PURPOSE:To enable automatic indication to a worker, concerning the preceding work of a manufacturing lot. CONSTITUTION:The title equipment is provided with the following; a lot working condition storage means 6 for storing the working condition of a manufacturing lot, a preceding working condition storage means 8 for storing the working condition of preceding work which are performed for preceding objects to be worked, and a working condition indication means 7 for indicating the working condition stored in the lot working condition storage means 6 when the preceding work is ended and the result of the preceding work satisfies a specified reference, as the working condition for the manufacturing lot main body to which the preceding wafer belongs.