MEASURING DEVICE OF DISTRIBUTION OF THICKNESS OF OXIDE FILM

• Main Authors: TANAKA TOMIO, HIRANO SHINYA, TANAKA KEIHACHIRO
• Format: Patent
• Language: English
• Published: 17.01.1992
• Subjects: MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; TESTING

PURPOSE:To automate measurement and to improve the precision in measurement by setting a plane-shaped heat radiation source above a metal plate to be measured and by determining the thickness of an oxide film on the basis of reflectance calculated from irradiation luminance and reflection luminance,...