PLATE-LIKE WORK CARRIER DEVICE

• Main Authors: ITO YASUHIRO, HORIE NOBORU, SUZUKI HIROSHI, KOZUKA TOSHIYUKI, IWAMA SATORU
• Format: Patent
• Language: English
• Published: 17.01.1991
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; CINEMATOGRAPHY; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; SEMICONDUCTOR DEVICES

PURPOSE:To improve the reliability of the carrying and to shorten carrying time by providing a holding and carrying mean with four carrier claws which inwardly moving the means from the outside of a plate-like work at a prescribed stroke with the aid of a driving mechanism, oppositely pinching the four coner parts and supporting the corners from bottom surface sides. CONSTITUTION:The device moves inwardly from the outside of the plate-like work 1 at a prescribed stroke with the aid of the driving mechanism and oppositely pinches its four corners. The plate-like work 1 is held by the holding/ carrying means 2 provided with four carrier claws 12 which support the corner parts from the bottom sides. The holding/carrying means 2 can be raised, sent, lowered and returned between a first work stage 16 and other work stage 17, and the plate-like work 1 can be carried from the first stage 16 to other work stage 17. Therefore, the rellabillity of carrying the plate-like work 1 can be improved, and the carrying time can be shortened.