LIFTER PIN CONTROL METHOD AND TRANSFER ARM

• Main Authors: NISHIMORI YUICHI, KAWAMURA TOSHIKI, MIYAMATSU JUNYA
• Format: Patent
• Language: English; Japanese
• Published: 08.04.2024
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

To properly adjust the height at substrate transfer by a transfer arm with multi-stage effectors in a substrate processing apparatus.SOLUTION: In a method for controlling lifter pins for transferring substrates between a transfer arm and a stage with a multi-stage effector in a processing module of a substrate processing system, the multi-stage effector has a plurality of sensors that determine the height of the lifter pins and uses a plurality of sensors to determine the height position of the lifter pins and adjusts the height of the lifter pins based on the results of that determination.SELECTED DRAWING: Figure 4 【課題】基板処理装置において多段エフェクタが搭載された搬送アームによる基板授受での高さの調整を適切に行う。【解決手段】基板処理装置の処理モジュール内において、多段エフェクタが搭載された搬送アームとステージとの間での基板授受を行うためのリフターピンの制御方法であって、前記多段エフェクタは、前記リフターピンの高さの判定を行う複数のセンサを有し、前記複数のセンサを用いて前記リフターピンの高さ位置を判定し、その判定結果に基づき前記リフターピンの高さ調整を行う。【選択図】図４