MEASURING METHOD, MEASURING SYSTEM, AND MEASURING APPARATUS

• Main Authors: YOKOYAMA KIMIHIRO, KOBAYASHI RYOMA, HATANAKA TAKAYUKI
• Format: Patent
• Language: English; Japanese
• Published: 15.03.2024
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; SEMICONDUCTOR DEVICES; TESTING

To provide a technique for calculating a deviation amount of a measuring apparatus with high accuracy.SOLUTION: A measuring method contains a step of acquiring a measuring value by four or more sensor electrodes of a measuring apparatus to be transported into a region. The measuring method contains a step of specifying two or more sensor electrodes that output a capacitance value for satisfying a reliability reference of the four or more sensor electrode. The measuring method contains a step of calculating a deviation amount on the basis of the measuring value of the specified two or more sensor electrodes.SELECTED DRAWING: Figure 13 【課題】測定器のずれ量を精度良く求める技術を提供する。【解決手段】測定方法は、領域内に搬送された測定器の４つ以上のセンサ電極によって測定値を取得する工程を含む。測定方法は、４つ以上のセンサ電極のうち、信頼性基準を満足する静電容量値を測定値として出力している２つ以上のセンサ電極を特定する工程を含む。測定方法は、特定された２つ以上のセンサ電極の測定値に基づいてずれ量を算出する工程を含む。【選択図】図１３